1.

Conference Proceedings

Conference Proceedings
Rabinovich,V.L. ; Kuijk,J.C.C.van ; Zhang,S. ; Bart,S.F. ; Gilbert,J.R.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.114-119,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
2.

Conference Proceedings

Conference Proceedings
Romanowicz,B.F. ; Bart,S.F. ; Gilbert,J.R.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.171-178,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680