Chen, L.-J. ; Ke, C.-M. ; Yu, S.S. ; Gau, T.-S. ; Chen, P. ; Ku, Y.-C. ; Lin, B.J. ; Engelhard, D. ; Hetzer, D. ; Yang, J.Y. ; Barry, K.A. ; Yap, L. ; Yang, W.
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Metrology, Inspection, and Process Control for Microlithography XVII. 1 pp.568-576, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Yu, J. ; Viswanathan, A. ; Miyagi, M. ; Uchida, J. ; Lane, L. ; Barry, K.A. ; Kajitani, M. ; Kikuchi, T. ; Chan, K.C. ; Stanke, F.E.
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Metrology, Inspection, and Process Control for Microlithography XVIII. pp.839-848, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Yu, J. ; Uchida, J. ; van Dommelen, Y. ; Carpaij, R. ; Cheng, S. ; Pollentier, I. ; Viswanathan, A. ; Lane, L. ; Barry, K.A. ; Jakatdar, N.
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Metrology, Inspection, and Process Control for Microlithography XVIII. pp.1059-1068, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Barry, K.A. ; Viswanathan, A. ; Niu, X. ; Bischoff, J.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XVIII. pp.1081-1086, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering