Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas. pp.73-79, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas. pp.185-190, 1995. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California. pp.30-35, 1996. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering