1.

Conference Proceedings
Conference Proceedings
1. Chemical and Physical Sputtering of Fluorinated Silicon
Barone, M.E. ; Craves, D.B.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.66-77,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
2.

Conference Proceedings
Conference Proceedings
2. Atomic-Scale Simulation of Defect-Induced Amorphization of Crystalline Silicon
Maroudas, D. ; Barone, M.E. ; Meng, B.
Pub. info.: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.387-397,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-4