1.

Conference Proceedings
Conference Proceedings
1. Mask cost tradeoffs for sub-100-nm technologies: stopping a runaway? (Invited Paper)
Balasinski, A.P.
Pub. info.: Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA.  pp.82-92,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5043
2.

Conference Proceedings
Conference Proceedings
2. Accuracy vs. complexity: OPC solutions and tradeoffs
Banachowicz, B. ; Iandolo, W. ; Balasinski, A.P. ; Staud, W. ; Ma, M.W. ; Sweis, J.
Pub. info.: 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.32-41,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5148
3.

Conference Proceedings
Conference Proceedings
3. Optimization of dummy pattern for mask data size reduction
Iandolo, W. ; Gilboa, Y. ; Phan, B. ; Balasinski, A.P.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.798-805,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256