1.

Conference Proceedings
Conference Proceedings
1. Enabling Single-Wafer Process Technologies for Reliable Ultra-Thin Gate Dielectrics
Miner, G. ; Xing, G. ; Joo, H.S. ; Sonchez, F. ; Yokoa, Y. ; Chen, C. ; Lopes, D. ; Balakrishna, A.
Pub. info.: Advances in rapid thermal processing : proceedings of the symposium.  pp.3-14,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-10
2.

Conference Proceedings
Conference Proceedings
2. Chemical Kinetics for Modeling Silicon Epitaxy from Chlorosilanes
Ho, P. ; Balakrishna, A. ; Chacin, J.M. ; Thilderkvist., A. ; Haas, B. ; Comita, P.B.
Pub. info.: Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis.  pp.117-122,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-23