1.

Conference Proceedings
Conference Proceedings
1. REACTIVE ION ETCHING OF In-BASED III-V SEMICONDUCTORS COMPARISON OF Cl AND C2H6 CHEMISTRIES
Pearton, S.J. ; Chakrabarti, U.K. ; Baiocchi, F.A. ; Hobson, W.S.
Pub. info.: In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.417-424,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 158
2.

Conference Proceedings
Conference Proceedings
2. METASTABLE ACTIVATION IN RAPID THERMAL ANNEALED ARSENIC IMPLANTED SILICON
Kamgar, A. ; Baiocchi, F.A.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.23-30,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
3.

Conference Proceedings
Conference Proceedings
3. COPPER CVD REACTIONS OF Cu(I)(hfac)(vtms) ADSORBED ON TiN
Guinn, K.V. ; Donnelly, V.M. ; Gross, M.E. ; Baiocchi, F.A. ; Petrov, I. ; Greene, J.E.
Pub. info.: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.379-386,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 282