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Characterisation of SOI Thin Film Transistors Fabricated Using SiGe Etch Stop Layers

Author(s):
Uppal, S ( (Qucenis University of Belfast) )
Gay, D ( (BCO Technologies Ltd) )
Armstrong, G A ( (Queenfs University of Belfast) )
McNeill, D W ( (Queenfs University of Belfast) )
Baine, P ( (Queenfs University of Belfast) )
Armstrong, B M ( (Queenfs University of Belfast) )
Gamble, H S ( (Queenfs University of Belfast) )
Yallup, K ( (BCO Technologies Ltd) )
3 more
Publication title:
Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-3
Pub. Year:
1999
Page(from):
219
Page(to):
224
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772259 [1566772257]
Language:
English
Call no.:
E23400/99-3
Type:
Conference Proceedings

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