1.

Conference Proceedings
Conference Proceedings
1. Encroachment on Silicon Substrate by PECVD Deposited Tungsten at Low Temperatures and the Effect of WF5 on Selectivity
Bain, M.F. ; Armstrong., B.M. ; Gamble, H.S.
Pub. info.: Plasma processing XIII : proceedings of the international symposium.  pp.80-89,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-6
2.

Conference Proceedings
Conference Proceedings
2. Fabrication and characterisation of Silicon On Insulator substrates incorporating thermal vias.
Bain, M.F. ; Baine, P. ; McNeill, D.W. ; Srinivasan, G. ; Jankovic, N. ; McCartney, J. ; Moore, R.A. ; Armstrong, B.M. ; Gamble, H.S.
Pub. info.: Science and technology of semiconductor-on-insulator structures and devices operating in a harsh environment.  pp.103-108,  2005.  Dordrecht.  Kluwer Academic Publishers
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 185