Hwang, J. M. ; Bartko, J. ; Rai-Choudhury, P. ; Bailey, W. E.
Pub. info.:
Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.323-328, 1988. Pittsburgh, Pa.. Materials Research Society
Fery, C. ; Bailey, W. E. ; Yamada, K. ; Wang, S. X.
Pub. info.:
In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A.. pp.185-, 1999. Warrendale, PA. MRS - Materials Research Society