1.

Conference Proceedings

Conference Proceedings
J.N. Hilfiker ; J.S. Hale ; B.D. Johs ; T.E. Tiwald ; R.A. Synowicki ; C.L. Bungay ; J.A. Woollam
Pub. info.: 44th Annual Technical Conference proceedings, April 21-26, 2001, Philadelphia, Pennsylvania.  pp.295-300,  2001.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 44
2.

Conference Proceedings

Conference Proceedings
S.M.G. Wilson ; S.S.H. Naqvi ; J.R. McNeil ; H.M. Marchman ; B.D. Johs
Pub. info.: Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California.  pp.479-494,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2439