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Conference Proceedings

1. Plasma-enhanced chemical vapor deposition of nitrogen-rich silicon oxynitride thin film for gate insulator application

W.-J. Qi ; W.-F. Yu ; B.-Z. Li ; J. Liu ; F. Lu

Pub. info.:	Second International Conference on Thin Film Physics and Applications : '94 TFPA : 15-17 April 1994, Shanghai, China. pp.470-473, 1994. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2364

Conference Proceedings

2. Interfacial reaction of bilayer Co/Ti with Si_1-xGe_x epitaxially grown on Si(100)

W.-J. Qi ; B.-Z. Li ; W.-N. Huang ; Z.-G. Gu ; H.-Q. Lu

Pub. info.:	Second International Conference on Thin Film Physics and Applications : '94 TFPA : 15-17 April 1994, Shanghai, China. pp.474-477, 1994. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2364

Conference Proceedings

3. Epitaxial CoSi₂ film grown on Si substrate by solid interaction of Co/Ti/Si and TiN/Co/Ti/Si multilayer

W.-J. Wu ; B.-Z. Li ; K. Shao ; Z. Sun ; Z.-G. Gu

Pub. info.:	Second International Conference on Thin Film Physics and Applications : '94 TFPA : 15-17 April 1994, Shanghai, China. pp.494-498, 1994. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2364