1.

Conference Proceedings
Conference Proceedings
1. Electronic speckle pattern interferometrie through shearography
B. Schulz
Pub. info.: First International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 3-5 October 1994, Ancona, Italy.  pp.153-157,  1994.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2358
2.

Conference Proceedings
Conference Proceedings
2. Meeting overlay requirements for future technology nodes with in-die overlay metrology
B. Schulz ; R. Seltmann ; J. Busch ; F. Hempel ; E. Cotte ; B. Alles
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
3.

Conference Proceedings
Conference Proceedings
3. An empirical approach adressing the transfer of mask placement errors during exposure
B. Alles ; B. Simeon ; E. Cotte ; T. Wandel ; B. Schulz ; R. Seltmann
Pub. info.: EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6533
4.

Conference Proceedings
Conference Proceedings
4. Using in-chip overlay metrology
S. Girol-Gunia ; B. Schulz ; N. Smith ; L. Binns
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  1  pp.69220N-1-69220N-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922
5.

Conference Proceedings
Conference Proceedings
5. Automated creation of production metrology recipes based on design information
J. P. Cain ; M. Threefoot ; K. Shah ; B. Schulz ; S. Girol- Gunia
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  1  pp.69221J-1-69221J-10,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922
6.

Conference Proceedings
Conference Proceedings
6. Understanding the Herschel-SPIRE bolometers
A. L. Woodcraft ; H. Nguyen ; J. Bock ; M. Griffin ; B. Schulz
Pub. info.: Millimeter and submillimeter detectors and instrumentation for astronomy IV : 26-28 June 2008, Marseille, France.  pp.70200F-1-70200F-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7020
7.

Conference Proceedings
Conference Proceedings
7. Noise performance of the Herschel-SPIRE bolometers during instrument ground tests
B. Schulz ; J. J. Bock ; N. Lu ; H. T. Nguyen ; C. K. Xu
Pub. info.: Millimeter and submillimeter detectors and instrumentation for astronomy IV : 26-28 June 2008, Marseille, France.  pp.702022-1-702022-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7020
8.

Conference Proceedings
Conference Proceedings
8. Q-switching with a dual mode single crystal photo-elastic modulator
F. Bammer ; R. Petkovsek ; B. Schulz ; M. Frede
Pub. info.: XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers : 15-19 September 2008, Lisboa, Portugal.  pp.71311H-1-71311H-4,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7131