1.

Conference Proceedings
Conference Proceedings
1. DEGRADATION OF CHELATING AGENTS IN HYDROGEN PEROXIDE AND APM+ SOLUTIONS
O. Doll ; S. Metzger ; B. O. Kolbesen
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.97-104,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
2.

Conference Proceedings
Conference Proceedings
2. Delineation of Crystalline Defects by Preferential Etching: Still more Alchemy than Science?
B. O. Kolbesen
Pub. info.: High purity silicon 9.  pp.361-364,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(4)