1.

Conference Proceedings

Conference Proceedings
B. J. Lu ; Y. Huang ; H. T. Tseng ; C. C. Yu ; L. Meng ; M. Liao ; M. Legenza
Pub. info.: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6519
2.

Conference Proceedings

Conference Proceedings
Y. F. Cheng ; Y. L. Chou ; Y. C. Hou ; B. J. Lu ; C. H. Yang
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
3.

Conference Proceedings

Conference Proceedings
B. J. Lu ; E. T. Liu ; A. Zeng ; A. Tseng ; S. Wu
Pub. info.: Advances in resist materials and processing technology XXV.  2  pp.69233G-1-69233G-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6923