1.

Conference Proceedings

Conference Proceedings
E. van Setten ; W. de Boeij ; B. Hepp ; N. le Masson ; G. Swinkels ; M. van de Kerkhof
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings

Conference Proceedings
J. Finders ; M. Dusa ; B. Vleeming ; H. Megens ; B. Hepp
Pub. info.: Optical Microlithography XXI.  1  pp.692408-1-692408-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924