1.

Conference Proceedings
Conference Proceedings
1. Advanced DFM applications using design-based metrology on CD SEM [6152-194]
Lorusso, G. F. ; Capodieci, L. ; Stoler, D. ; Schulz, B. ; Roling, S. ; Schramm, J. ; Tabery, C. ; Shah, K. ; Singh, B. ; Abbott, G. ; Azordegan, A. ; Heinrichs, L. ; Kaliblotzky, Z. ; Castel, E.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520B-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
2.

Conference Proceedings
Conference Proceedings
2. Impact of line width roughness on device performance [6152-32]
Lorusso, G. F. ; Leunissen, L. H. A. ; Gustin, C. ; Mercha, A. ; Jurczak, M. ; Marchman, H. M. ; Azordegan, A.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520W-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152