1.

Conference Proceedings

Conference Proceedings
Awadelkarim, O.O. ; Henry, A. ; Monemar, B. ; Lindstrom, J.L.
Pub. info.: Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.283-286,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 163
2.

Conference Proceedings

Conference Proceedings
Mikulan, P.I. ; Awadelkarim, O.O. ; Fonash, S.J. ; Reinhardt, K.A. ; Rembetski, J.F.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.295-301,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
3.

Conference Proceedings

Conference Proceedings
Chen, W.M. ; Awadelkarim, O.O. ; Monemar, B. ; Lindstrom, J.L. ; Oehrlein, G.S.
Pub. info.: Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.377-382,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 163
4.

Conference Proceedings

Conference Proceedings
Fonash, S.J. ; Ditizio, R.A. ; Gu, T. ; Mikulan, P.I. ; Awadelkarim, O.O. ; Collins, R.W. ; Rembetski, J.F. ; Reinhardt, K.A. ; Chan, Y.D.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.55-68,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
5.

Conference Proceedings

Conference Proceedings
Awadelkarim, O.O. ; Gu, T. ; Mikulan, P.I. ; Fonash, S.J. ; Reinhardt, K. ; Chan, Y.D.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.331-342,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
6.

Conference Proceedings

Conference Proceedings
Mikulan, P.I. ; Koo, T.T. ; Awadelkarim, O.O. ; Fonash, S.J. ; Ta, T. ; Chan, Y.D.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.396-402,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
7.

Conference Proceedings

Conference Proceedings
Gu, T. ; Awadelkarim, O.O. ; Fonash, S.J. ; Rembetski, J.F. ; Chan, Y.D.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.302-310,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21