1.

Conference Proceedings
Conference Proceedings
1. Processing of Thick Thermal Gate Oxides in Trenchs
Wu, C.T. ; Ridley, R. ; Dolny, G. ; Grebs, T. ; Hao, J. ; Suliman, S. ; Venkataraman, B. ; Awadelkarim, O. ; Williams, R. ; Roman, P. ; Ruzyllo, J.
Pub. info.: Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium.  pp.127-133,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-7
2.

Conference Proceedings
Conference Proceedings
2. Investigation of Hydrogen Permeation Doping Deactivation Caused by Oxide Etching
Reinhardt, K. ; Gondran, C. ; Marks, J. ; DiVincenzo, B. ; Awadelkarim, O. ; Fonash, S.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.343-352,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21