1.

Conference Proceedings
Conference Proceedings
1. COMPARISON OF SHORT TIME ANNEALING OF IMPLANTED SILICON LAYERS WITH TUNGSTEN-HALOGEN LAMP AND MERCURY ARC LAMP SOURCES
Wouters, D. ; Avau, D. ; Mertens, P. ; Maes, H.E.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.217-224,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
2.

Conference Proceedings
Conference Proceedings
2. A COMPARISON OF DIFFERENT TECHNIQUES FOR THE RAPID THERMAL ANNEALING OF ION IMPLANTS IN SILICON
Wouters, D. J. ; Vanhellemont, J. ; Avau, D. ; Maes, H. E.
Pub. info.: Fundamentals of beam-solid interactions and transient thermal processing : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.731-736,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 100