1.

Conference Proceedings
Conference Proceedings
1. Use of Transmission Electron Microscopy for the Characterization of the Structure of Pt/PZT/Pt/TiN/Ti/SiO2/Si Correlation with Electrical Properties
Verniere, F. ; Eakim, B. ; Aubert, P. ; Ayguavives, F. ; Agius, B. ; Bisaro, G.
Pub. info.: Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes.  pp.309-316,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-30
2.

Conference Proceedings
Conference Proceedings
2. Interface and Volume Defects in SiNx:H/<100>Si Prepared by DECR Plasma Deposition
Aubert, P. ; Delmotte, F. ; Hugon, M.C. ; Agius, B. ; Cantin, J.L. ; von Bardeleben, H.J.
Pub. info.: Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes.  pp.283-291,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-30
3.

Conference Proceedings
Conference Proceedings
3. Correlation between Insitu Optical Emission Spectrocopy of a O2/Ar Reactive Plasma and Composition of PZT Thin Film Deposited from Metallio Target by RF Magnetron Sputtering
Ayguavives, F. ; Aubert, P. ; Eakim, B. ; Machu, A. ; Varniere, F. ; Agius, B.
Pub. info.: Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes.  pp.299-308,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-30
4.

Conference Proceedings
Conference Proceedings
4. Morphological, chemical and structural study of sputtered Al/Al2O3 multilayers
Paven-Thivet, C. Le ; Aubert, P. ; Fusil, S. ; Zozime, A. ; Malibert, C. ; Ph. Houdy
Pub. info.: New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A..  pp.81-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 616
5.

Conference Proceedings
Conference Proceedings
5. Correlation Between In situ Optical Emission Spectroscopy in a Reactive O2/Ar rf Magnetron Sputtering Discharge and PZT Thin Film Composition
Ayguavives, F. ; Aubert, P. ; Ea-Kim, B. ; Agius, B.
Pub. info.: Ferroelectric thin films VI : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A..  pp.333-,  1998.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 493
6.

Conference Proceedings
Conference Proceedings
6. A Mechanical Study of W and W2N Single Layers, and W2N/W Multilayers
Maille, L. ; Sant, C. ; Aubert, P. ; Garnier, P.
Pub. info.: Mechanical properties derived from nanostructuring materials : symposium held April 22-25, 2003, San Francisco, California, U.S.A..  pp.239-244,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 778
7.

Conference Proceedings
Conference Proceedings
7. Mechanical and Structural Properties of TiC and TiCN Thin Films Grown by RF Sputtering
Mani, A. ; Aubert, P. ; Khodja, H. ; Houdy, P.
Pub. info.: Mechanical properties derived from nanostructuring materials : symposium held April 22-25, 2003, San Francisco, California, U.S.A..  pp.201-206,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 778