1.

Conference Proceedings
Conference Proceedings
1. CHARACTERIZATION OF 300 mm SILICON POLISHED WAFERS
Au, C. ; Messina, T. ; Goodall, R.K. ; Huff, H.R.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.641-659,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
2.

Conference Proceedings
Conference Proceedings
2. Oxygen Precipitation Behaviour in 300 mm Polished Czochralski Silicon Wafers
Ono, T. ; Rozgonyi, G.A. ; Au, C. ; Messina, T. ; Goodall, R.K. ; Huff, H.R.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.125-134,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13