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12 results

Conference Proceedings

1. Passive and Active Pyrometry in RTP and RTCVD Systems

Glazman, E.D. ; Glazman, A.L. ; Atzmon, Z. ; Gilbon, H. ; Iskevich, F. ; Thon, A.

Pub. info.:	Advances in rapid thermal processing : proceedings of the symposium. pp.371-374, 1999. Pennington, N. J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-10

Conference Proceedings

2. Integrated Rapid Thermal CVD Processing Solutions For 0.18-0.25 ｦﾌm Technologies

Gilboa, H. ; Gilboa, Y. E. ; Atzmon, Z. ; Levy, S. ; Spilberg, H. ; Bransky, E. ; Doitel, Z. ; Thakur, R. P. S. ; Weimer, R. A. ; DeBoer, S. ; Pan, J.

Pub. info.:	Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.215-, 1997. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	470

Conference Proceedings

3. Wet Oxidation of Si1-x-yGexCy Layers on (100) Si

Bair, A. E. ; Atzmon, Z. ; Alford, T. L. ; Chandrasekhar, D. ; Smith, David J.

Pub. info.:	Thermodynamics and kinetics of phase transformations : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.625-, 1996. Pittsburgh, Penn.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	398

Conference Proceedings

4. INTERFACIAL REACTIONS OF COPPER / REFRACTORY ALLOY AND BILAYER FILMS ON SiO2

Spreitzer, R. L. ; Rafalski, S. A. ; Adams, D. ; Russell, S. W. ; Atzmon, Z. ; Li, J. ; Alford, T. L. ; Mayer, J. W.

Pub. info.:	Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.. pp.631-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	337

Conference Proceedings

5. VISUALIZATION OF ION CHANNELING OF (100)Si AND Si1-xGex EPITAXIAL GROWN LAYERS ON SILICON

Xu, M. ; Atzmon, Z. ; Schroer, A. ; Wilkens, B. J. ; Mayer, J. W.

Pub. info.:	Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.679-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	316

Conference Proceedings

6. Sb IMPLANTATION IN Si1-xGex/Si(100) STRUCTURES

Atzmon, Z. ; Eizenberg, M. ; revesz, P. ; Mayer, J. W. ; Schaffler, F.

Pub. info.:	Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.. pp.247-254, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	235

Conference Proceedings

7. KINETICS OF COPPER GRAIN GROWTH DURING NITRIDATION OF Cu-Cr AND Cu-Ti THIN FILMS BY IN SITU TEM

Atzmon, Z. ; Sharma, R. ; Russell, S. W. ; Mayer, J. W.

Pub. info.:	Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.. pp.625-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	337

Conference Proceedings

8. Cobalt and Titanium Metallization of SiGeC for Shallow Contacts

Bair, A. E. ; Alford, T. L. ; Atzmon, Z. ; Marcus, S. D. ; Doller, D. C. ; Morton, R. ; Lau, S. S. ; Mayer, J. W.

Pub. info.:	Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.529-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	427

Conference Proceedings

9. STRAIN MEASUREMENTS OF SiGeC HETEROEPITAXIAL LAYERS ON Si(100) USING ION BEAM ANALYSIS

Sego, S. ; Culbertson, R. J. ; Ye, P. ; Hearne, S. ; Xiang, J. ; Herbots, N. ; Atzmon, Z. ; Bair, A. E.

Pub. info.:	Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.. pp.461-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	354

10.

Conference Proceedings

10. Heteroepitaxial Si1-x-yGexCy Layer Growth on (100)Si by Atmospheric Pressure Chemical Vapor Deposition

Atzmon, Z. ; Bair, A. E. ; A'ford, T. L. ; Chandrasekhar, D. ; Smith, David J. ; Mayer, J. W.

Pub. info.:	Evolution of epitaxial structure and morphology : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.117-, 1996. Pittsburgh, Pennsylvania. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	399

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