1.

Conference Proceedings
Conference Proceedings
1. Scatterfield microscopy using back focal plane imaging with an engineered illumination field [6152-19]
Patrick, H. J. ; Attota, R. ; Barnes, B. M. ; Germer, T. A. ; Stocker, M. T. ; Silver, R. M. ; Bishop, M. R.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520J-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
2.

Conference Proceedings
Conference Proceedings
2. Optical critical dimension measurement and illumination analysis using the through-focus focus metric [6152-20]
Attota, R. ; Silver, R. M. ; Bishop, M. R. ; Dixson, R. G.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520K-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
3.

Conference Proceedings
Conference Proceedings
3. Calibration strategies for overlay and registration metrology
Silver, R.M. ; Stocker, M.T. ; Attota, R. ; Bishop, M. ; Jun, J.-S.J. ; Marx, E. ; Davidson, M.P. ; Larrabee, R.D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.103-120,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
4.

Conference Proceedings
Conference Proceedings
4. Comparison of measured optical image profiles of silicon lines with two different theoretical models
Silver, R.M. ; Attota, R. ; Stocker, M. ; Jun, J.J. ; Marx, E. ; Larrabee, R.D. ; Russo, B. ; Davidson, M.P.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.409-429,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
5.

Conference Proceedings
Conference Proceedings
5. New method to enhance overlay tool performance
Attota, R. ; Silver, R.M. ; Stocker, M.T. ; Marx, E. ; Jun, J.-S.J. ; Davidson, M.P. ; Larrabee, R.D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.428-436,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
6.

Conference Proceedings
Conference Proceedings
6. High-resolution optical overlay metrology
Silver, R.M. ; Attota, R. ; Stocker, M. ; Bishop, M. ; Jun, J.-S.J. ; Marx, E. ; Davidson, M.P. ; Larrabee, R.D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.78-95,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
7.

Conference Proceedings
Conference Proceedings
7. Evaluation of new in-chip and arrayed line overlay target designs
Attota, R. ; Silver, R.M. ; Bishop, M. ; Marx, E. ; Jun, J.-S.J. ; Stocker, M. ; Davidson, M.P. ; Larrabee, R.D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.395-402,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
8.

Conference Proceedings
Conference Proceedings
8. The limits of image-based optical metrology (Invited Paper) [6152-35]
Silver, R. M. ; Barnes, B. M. ; Attota, R. ; Jun, J. ; Filliben, J. ; Soto, J. ; Stocker, M. ; Lipscomb, P. ; Marx, E. ; Patrick, H. J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520Z-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
9.

Conference Proceedings
Conference Proceedings
9. Calibrating optical overlay measurements [6152-37]
Lipscomb, W. P. III ; Allgair, J. A. ; Bunday, B. D. ; Bishop, M. R. ; Silver, R. M. ; Attota, R. ; Stocker, M. D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.615211-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152