1.

Conference Proceedings
Conference Proceedings
1. A NOVEL TECHNIQUE FOR DETECTING DEFECTS IN ULSI METALLIZED SYSTEMS
Pico, C. A. ; Aton, T. ; Gale, R. J. ; Bennett-Lilley, M. ; Harward, M. ; Mahant-Shetti, S. ; Weaver, T.
Pub. info.: Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A..  pp.507-510,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 181
2.

Conference Proceedings
Conference Proceedings
2. OPC on real-world circuitry
O'Brien, S.C. ; Aton, T. ; Mason, M.E. ; Vickery, C. ; Randall, J.N.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.107-115,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042