Mubarek, Huda A.W.A.El ; Wang, Yun ; Bonar, Janet M. ; Hemment, Peter ; Ashburn, Peter
Pub. info.:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.375-380, 2004. Warrendale, Pa.. Materials Research Society
Dilliway, Gabriela D.M. ; Cowern, Nicholas E.B. ; Xu, Lu ; McNally, Patrick J. ; Jeynes, Chris ; Mendoza, Emest ; Ashburn, Peter ; Bagnall, Darren M.
Pub. info.:
Nanoengineered assemblies and advanced micro/nanosystems : symposium held April 13-16, 2004, San Francisco, California, U.S.A.. pp.351-356, 2004. Warrendale, Pa.. Materials Research Society