1.

Conference Proceedings
Conference Proceedings
1. Electron microscopy techniques for the assessment of localised stress distributions in semiconductors
Vanhellemont, J. ; Janssens, K.G.F. ; Frabboni, S. ; Balboni, R. ; Armigliato, A.
Pub. info.: ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands.  pp.173-192,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-30
2.

Conference Proceedings
Conference Proceedings
2. As AND B ION IMPLANTATION THROUGH Mo AND INTO Mo-SILICIDE LAYERS FOR SHALLOW JUNCTION FORMATION
Angelucci, R. ; Merli, M. ; Solmi, S. ; Armigliato, A. ; Gabilli, E. ; Govoni, D. ; Poggi, A.
Pub. info.: Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.751-758,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 157
3.

Conference Proceedings
Conference Proceedings
3. Transmission Electron Diffraction Techniques for NM Scale Strain Measurement in Semiconductors
Vanhellemont, J. ; Janssens, K. G. F. ; Frabboni, S. ; Smeys, P. ; Balboni, R. ; Armigliato, A.
Pub. info.: Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.479-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 406
4.

Conference Proceedings
Conference Proceedings
4. ELECTRICAL CHARACTERIZATION OF ION IMPLANTED, THERMALLY ANNEALED TiN FILMS ACTING AS DIFFUSION BARRIERS ON SHALLOW JUNCTION SILICON DEVICES
Armigliato, A. ; Finetti, M. ; Gabilli, E ; Guerri, S. ; Ostoja, P. ; Sabato, G. ; Scorzoni, A.
Pub. info.: Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.183-188,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 45
5.

Conference Proceedings
Conference Proceedings
5. Analysis of Localised Strains in Crystals by Convergent Beam Electron Diffraction
Armigliato, A. ; Balboni, R. ; Benedetti, A. ; Frabboni, S.
Pub. info.: High-pressure crystallography.  pp.277-294,  2004.  Dordrecht.  Kluwer Academic Publishers
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 140
6.

Conference Proceedings
Conference Proceedings
6. Transmission Electron Diffraction Techniques for NM Scale Strain Measurement in Semiconductors
Vanhellemont, J. ; Janssens, K. G. F. ; Frabboni, S. ; Smeys, P. ; Balboni, R. ; Armigliato, A.
Pub. info.: Surface/interface and stress effects in electronic material nanostructures : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.435-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 405
7.

Conference Proceedings
Conference Proceedings
7. Characterization of Al-Si ohmic contacts obtained on shallow junctions by laser and electron beam annealing
Armigliato, A. ; De Luca, P. ; Finetti, M. ; Solmi, S.
Pub. info.: Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.329-336,  1981.  New York.  North Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 1
8.

Conference Proceedings
Conference Proceedings
8. Determination of Bulk Mismatch Values in Heterostructures by TEM/CBED
Armigliato, A. ; Balboni, R. ; Frabboni, S.
Pub. info.: Surface/interface and stress effects in electronic material nanostructures : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.467-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 405
9.

Conference Proceedings
Conference Proceedings
9. Numerical analysis of the process-induced stresses in silicon microstructures
Senez, V. ; Hoffmann, T. ; Armigliato, A. ; De Wolf, I.
Pub. info.: Microelectronics: Design, Technology, and Packaging.  pp.350-361,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5274