1.

Conference Proceedings
Conference Proceedings
1. Process Design and Integration of Salicide and Source/Drain Process Modules for Improved Device Performance
Apte, Pushkar P. ; Saxena, Sharad ; Rao, Suraj ; Vasanth, Karthik ; Prinslow, Douglas A. ; Kittl, Jorge A. ; Breedijk, Terence ; Pollack, Gordon
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.319-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
2.

Conference Proceedings
Conference Proceedings
2. Process Design and Integration of Salicide and Source/Drain Process Modules for Improved Device Performance
Apte, Pushkar P. ; Saxena, Shared ; Rao, Suraj ; Vasanth, Karthik ; Prinslow, Douglas A. ; Kittl, Jorge A. ; Breedijk, Terence ; Pollack, Gordon
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.251-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
3.

Conference Proceedings
Conference Proceedings
3. TEMPERATURE UNIFORMITY OPTIMIZATION USING THREE-ZONE LAMP AND DYNAMIC CONTROL IN RAPID THERMAL MULTIPROCESSOR
Apte, Pushkar P. ; Wood, Samuel ; Booth, Len ; Saraswat, Krishna C. ; Moslehi, Mehrdad M.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.209-214,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
4.

Conference Proceedings
Conference Proceedings
4. DEMONSTRATION OF MULTIPROCESSING BY SILICON EPITAXY FOLLOWING IN-SITU CLEANING
Apte, Pushkar P. ; Venkatraman, Ramnath ; Saraswat, Krishna C. ; Moslehi, Mehrdad M. ; Yeakley, Richard
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.273-278,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
5.

Conference Proceedings
Conference Proceedings
5. THERMALLY DRIVEN IN-SITU REMOVAL OF NATIVE OXIDE USING ANHYDROUS HYDROGEN FLUORIDE
Apte, Pushkar P. ; Park, Heungsoo ; Saraswat, Krishna C. ; Helms, C. R.
Pub. info.: Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.281-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 318
6.

Conference Proceedings
Conference Proceedings
6. A MODEL FOR LOW-RESISTIVITY TiSi2 FORMATION ON NARROW POLYSILICON LINES
Apte, Pushkar P. ; Pollack, Gordon
Pub. info.: Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA.  pp.539-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 355
7.

Conference Proceedings
Conference Proceedings
7. Process Modeling and Integration of the Salicide Process Module for Sub-Half Micron Technology
Apte, Pushkar P. ; Prinslow, Douglas A. ; Kittl, Jorge A. ; List, R. Scott ; Pollack, Gordon
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.233-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402