Aono, N. ; Itoh, T. ; Iwasaki, T. ; Nitta, S. ; Nonomura, S. ; Yokoi, H.
Pub. info.:
Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A.. pp.291-296, 1999. Warrendale, Pa.. Materials Research Society