1.

Conference Proceedings
Conference Proceedings
1. Arsenic Trapping and its Effect on Enhanced Diffusion
Brindos, R. ; Law, M. E. ; Jones, K. S. ; Andideh, E.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A..  pp.169-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 568
2.

Conference Proceedings
Conference Proceedings
2. Influence of Arsenic Clustering and Precipitation on the Interstitial and Vacancy Concentration in Silicon
Brindos, R. ; Clark, M.H. ; Jones, K.S. ; Griglione, M. ; Gossmann, Hans-J. ; Agarwal, A. ; Murto, B. ; Andideh, E.
Pub. info.: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 669