1.

Conference Proceedings

Conference Proceedings
Brooks, C.B. ; Anderson, R.B., III ; Clevenger, J.O. ; Collard, C. ; Halim, M. ; Sahin, T. ; Mak, A.W.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.749-757,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
2.

Conference Proceedings

Conference Proceedings
Collard, C. ; Anderson, S.A. ; Anderson, R.B., III ; Clevenger, J.O. ; Halim, M. ; Brooks, C.B. ; Buie, M.J. ; Sahin, T.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.744-748,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256