1.

Conference Proceedings
Conference Proceedings
1. Low Energy Oxygen Implantation for Dose Reduction in SIMOX (Invited)
Anc, M J ; Cordss, B F ; Blake, J G ; Nakai, T
Pub. info.: Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.51-60,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-3
2.

Conference Proceedings
Conference Proceedings
2. Electrochemical analysis of SIMOX buried oxides
Allen, L P ; Anc, M J ; Duffy, M ; Parechanian, J H ; Yap, J H
Pub. info.: Proceedings of the Seventh International Symposium on Silicon-on-Insulator Technology and Devices.  pp.18-27,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-3