EVALUATION OF MEGASONIC CLEANING SYSTEMS FOR PARTICLE REMOVAL EFFICIENCY AND DAMAGING
- Author(s):
Vereecke, G. Holsteyns, F. Veltens, J. Lux, M. Amauts, S. Kenis, K. Vos, R. Mertens, P. Heyns, M. - Publication title:
- Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2003-26
- Pub. Year:
- 2003
- Page(from):
- 145
- Page(to):
- 152
- Pages:
- 8
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774116 [156677411X]
- Language:
- English
- Call no.:
- E23400/200326
- Type:
- Conference Proceedings
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