Kubota, H. ; Numano, M. ; Amai, T. ; Miyashita, M. ; Samata, S. ; Matsushita, Y.
Pub. info.:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.225-236, 1994. Pennington, NJ. Electrochemical Society
Samata, S. ; Numano, M. ; Amai, T. ; Matsushita, Y. ; Kobayashi, K. ; Yamamoto, A. ; Kawaguchi, T. ; Nadahara, S. ; Yamabe, K.
Pub. info.:
Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects. pp.101-110, 1994. Pennington, NJ. Electrochemical Society