1.

Conference Proceedings
Conference Proceedings
1. PZT stack etch for MEMS devices in a capacitively coupled high-density plasma reactor
Werbaneth, P.F. ; Almerico, J. ; Jerde, L.G. ; Marks, S.
Pub. info.: Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia.  pp.267-273,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4592
2.

Conference Proceedings
Conference Proceedings
2. Plasma Etch Processing for Shallow Trench Isolation Microcontour Control
Werbaneth, P. ; Almerico, J. ; Jerde, L. ; Rousey-Seidel, M.
Pub. info.: Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology.  pp.496-503,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-17