1.

Conference Proceedings
Conference Proceedings
1. Applications of image diagnostics to metrology quality assurance and process control
Allgair, J.A. ; Boksha, V.V. ; Bunday, B.D. ; Diebold, A.C. ; Cole, D.C. ; Davidson, M.P. ; Hutcheson, J.D. ; Gurnell, A.W. ; Joy, D.C. ; McIntosh, J.M. ; Muckenhirn, S.G. ; Pellegrini, J.C. ; Larrabee, R.D. ; Potzick, J.E. ; Vlada, A.E. ; Smith, N.P. ; Starikov, A. ; Sulivan, N.T. ; Wells, O.C.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.251-277,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042
2.

Conference Proceedings
Conference Proceedings
2. Performance study of new segmented overlay marks for advanced wafer processing
Adel, M.E. ; Allgair, J.A. ; Benoit, D.C. ; Ghinovker, M. ; Kassel, E. ; Nelson, C. ; Robinson, J.C. ; Seligman, G.S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.453-463,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
3.

Conference Proceedings
Conference Proceedings
3. Results of benchmarking of advanced CD-SEMs at the 90-nm CMOS technology node
Bunday, B.D. ; Bishop, M. ; Allgair, J.A.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.151-172,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
4.

Conference Proceedings
Conference Proceedings
4. Determination of optimal parameters for CD-SEM measurement of line-edge roughness
Bunday, B.D. ; Bishop, M. ; McCormack, D.W., Jr. ; Villarrubia, J.S. ; Vladar, A.E. ; Dixson, R. ; Vorburger, T.V. ; Orji, N.G. ; Allgair, J.A.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.515-533,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375