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11 results

Conference Proceedings

1. RAPID GROWTH OF CERAMIC FILMS BY PARTICLE-VAPOR CODEPOSITION

Hurt, Robert H. ; Allendorf, Mark D.

Pub. info.:	Chemical vapor deposition of refractory metals and ceramics II : symposium held December 4-6, 1991, Boston, Massachusetts, U.S.A.. pp.59-64, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	250

Conference Proceedings

2. THE REACTIVITY OF HCl AND METHYLTRICHLOROSILANE WITH SILICON CARBIDE SURFACES

Allendorf, Mark D. ; Outka, Duane A.

Pub. info.:	Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.. pp.439-444, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	282

Conference Proceedings

3. THEORETICAL STUDY OF GAS-PHASE THERMODYNAMICS RELEVANT TO SILICON CARBIDE CHEMICAL VAPOR DEPOSITION

Allendorf, Mark D. ; Melius, Carl F.

Pub. info.:	Chemical vapor deposition of refractory metals and ceramics II : symposium held December 4-6, 1991, Boston, Massachusetts, U.S.A.. pp.29-34, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	250

Conference Proceedings

4. The Reaction of NH3 With TiN: Implications for CVD

Schulberg, Michelle T. ; Allendorf, Mark D. ; Outka, Duane A.

Pub. info.:	Covalent ceramics III - science and technology of non-oxides : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.453-, 1996. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	410

Conference Proceedings

5. The Chemistry of Boron and Titanium Diboride Formation: Decomposition of TiCl4 and BCl3 in Hydrogen and Helium

Osterheld, Thomas H. ; Allendorf, Mark D.

Pub. info.:	Covalent ceramics III - science and technology of non-oxides : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.465-, 1996. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	410

Conference Proceedings

6. A Model of the Gas-Phase Chemistry of Boron Nitride CVD From BCl3 and NH3

Allendorf, Mark D. ; Melius, Carl F. ; Osterheld, Thomas H.

Pub. info.:	Covalent ceramics III - science and technology of non-oxides : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.459-, 1996. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	410

Conference Proceedings

7. THE DECOMPOSITION OF METHYLTRICHLOROSILANE: STUDIES IN A HIGH-TEMPERATURE FLOW REACTOR

Allendorf, Mark D. ; Osterheld, Thomas H. ; Melius, Carl F.

Pub. info.:	Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.105-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	334

Conference Proceedings

8. Homogeneous and Heterogeneous Contributions to the Partial Oxidation of Ethane: Pressure, Flow Rate, and Pore Size Effects

Zerkle, David K. ; Allendorf, Mark D. ; Wolf, Markus ; Deutschrnann, Olaf

Pub. info.:	AIChE 2000 ANNUAL MEETING. 2000. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE meeting [papers]
Ser. no.:	2000

Conference Proceedings

9. The Interaction of HCl With Polycrystalline β-SiC: Evidence for a Site-Blocking Mechanism for HCl Inhibition of SiC CVD

Schulberg, Michelle T. ; Allendorf, Mark D. ; Outka, Duane A.

Pub. info.:	Covalent ceramics III - science and technology of non-oxides : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.471-, 1996. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	410

10.

Conference Proceedings

10. MODELING THE GAS-PHASE CHEMISTRY OF SILICON CARBIDE FORMATION

Allendorf, Mark D. ; Osterheld, Thomas H.

Pub. info.:	Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A.. pp.39-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	363

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