1.

Conference Proceedings

Conference Proceedings
Allendorf, M.D. ; Melius, C.F. ; Osterheld, T.H.
Pub. info.: Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition.  pp.20-26,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-2
2.

Conference Proceedings

Conference Proceedings
Allendorf, M.D. ; Arsenlis, A. ; Bastasz, R. ; Evans, G.H. ; Larson, R.S. ; Schulberg, M.T.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.291-299,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9
3.

Conference Proceedings

Conference Proceedings
Larson, R.S. ; Allendorf, M.D.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.41-46,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5
4.

Conference Proceedings

Conference Proceedings
Allendorf, M.D. ; Osterheld, T.H.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.16-22,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5
5.

Conference Proceedings

Conference Proceedings
Allendorf, M.D. ; Janssen, C.L. ; Colvin, M.E. ; Melius, C.F. ; Nielsen, I.M.B. ; Osterheld, T.H. ; Ho, P.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.393-400,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2
6.

Conference Proceedings

Conference Proceedings
Bastasz, R. ; Allendorf, M.D.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.59-68,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13
7.

Conference Proceedings

Conference Proceedings
de Persis, S. ; Yeyssandier, F. ; McDaniel, A. ; Allendorf, M.D.
Pub. info.: CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition.  pp.75-83,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-13
8.

Conference Proceedings

Conference Proceedings
McDaniel, A.H. ; Allendorf, M.D.
Pub. info.: Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis.  pp.52-57,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-23
9.

Conference Proceedings

Conference Proceedings
Wohlforr, A. ; Devi, A. ; Rogge, W. ; Fischer, R.A. ; Schaefer, J. ; Wolfrum, J. ; Allendorf, M.D.
Pub. info.: CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition.  pp.697-706,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-13
10.

Conference Proceedings

Conference Proceedings
Allendorf, M.D. ; Nielsen, I.M.B. ; Melius, C.F. ; van Mol, A.M.B.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.55-64,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8