1.

Technical Paper
Technical Paper
1. End-of-Fabrication CMOS Process Monitor
Buehier, M.G. ; Allen, R.A. ; Blaes, B.R. ; Hannaman, D.J. ; Lieneweg, U. ; Lin, Y.-S. ; Sayah, H.R.
Pub. info.: NASA Technical Reports.  (NASA-CR-189761),  pp.1-112,  1990.  National Aeronautics and Space Adminstration
2.

Technical Paper
Technical Paper
2. Product Assurance Technology for Procuring Reliable, Radiation-Hard, Custom LSI/VLSI Electronics : Report for Period: October 1984 - September 1986
Buehler, M.G. ; Allen, R.A. ; Blaes, B.R. ; Hicks, K.A. ; Jennings, G.A. ; Lin, Y.-S. ; Pina, C.A. ; Sayah, H.R. ; Zamani, N.
Pub. info.: NASA Technical Reports.  (NASA-CR-185954),  pp.1-236,  1989.  National Aeronautics and Space Adminstration
3.

Conference Proceedings
Conference Proceedings
3. CD reference materials for sub-10th μm applications
Cresswell, M.W. ; Bogardus, E.H. ; de Pinillos, J.V.M. ; Bennett, M.H. ; Allen, R.A. ; Guthrie, W.F. ; Murabito, C.E. ; am Ende, B.A. ; Linholm, L.W.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.116-127,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689