Charge Transport in Anodized Ta205, HfO2 and ZrO2 Thin Films
- Author(s):
Jones, C.D.W. ( (Bell Labs - Lucent Technologies) ) Fleming, R.M ( (Bell Labs - Lucent Technologies) ) Lang, D.V. ( (Bell Labs - Lucent Technologies) ) Steigerwald, M.L. ( (Bell Labs - Lucent Technologies) ) Murphy, D.W. ( (Bell Labs - Lucent Technologies) ) Vyas, B. ( (Bell Labs - Lucent Technologies) ) Alers, G.B. ( (Bell Labs - Lucent Technologies) ) Wong, Y.-H. ( (Bell Labs - Lucent Technologies) ) van Dover, R.B. ( (Bell Labs - Lucent Technologies) ) Kwo, J.R. ( (Bell Labs - Lucent Technologies) ) Sergent, A.M. ( (Bell Labs - Lucent Technologies) ) - Publication title:
- Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2000-5
- Pub. Year:
- 2000
- Page(from):
- 205
- Page(to):
- 213
- Pages:
- 9
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772709 [1566772702]
- Language:
- English
- Call no.:
- E23400/2000-5
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Material and Electrical Characterization of Carbon-Doped Ta2O5 Films for Embedded DRAM Applications
Materials Research Society |
Springer |
Materials Research Society |
8
Conference Proceedings
SUPERLATTICE MODULATION IN Nd2CuO4 AND THE ELECTRON-DOPED SYSTEMS Nd2-xCuO4-xFx
Materials Research Society |
Materials Research Society |
9
Conference Proceedings
MATERIAL PROPERTIES OF GaAs-ON-Si AND FABRICATION OF DIGITAL INTEGRATED CIRCUITS
Materials Research Society |
4
Conference Proceedings
Nucleation and Growth of ALD HfO2 and ZrO2 Films, and the Effects of Post-Deposition Annealing on Electrical Properties
Electrochemical Society |
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
6
Conference Proceedings
EPITAXIAL FILMS OF HIGH TC OXIDE SUPERCONDUCTORS Y1Ba2Cu3O7 GROWN ON SrTiO3 BY MOLECULAR BEAM EPITAXY
Materials Research Society |
MRS - Materials Research Society |