Akatsu, T. ; Ploessl, A. ; Stenzel, H. ; Goesele, U.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.60-67, 1999. Pennington, N.J.. Electrochemical Society
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.232-243, 1999. Pennington, N.J.. Electrochemical Society
Yoshida, M. ; Shinoda, Y. ; Akatsu, T. ; Wakai, F.
Pub. info.:
Superplasticity in advanced materials : ICSAM 2003 : [8th International Conference on Superplasticity in Advanced Materials, 28-30 July 2003, St. Catherine's College, Oxford, UK]. pp.359-364, 2004. Zuerich, Switzerland. Trans Tech Publications
Daval, N. ; Guiot, E. ; Bourdelle, K. K. ; Kennard, M. ; Cayrefourcq, I. ; Akatsu, T. ; Mazure, C. ; Cerva, H. ; Rucki, A.
Pub. info.:
Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France. pp.42-51, 2005. Pennington, N.J.. Electrochemical Society
Tauzin, A. ; Akatsu, T. ; Rabarot, M. ; Dechamp, J. ; Zussy, M. ; Moriceau, H. ; Michaud, J.F. ; Charvet, A.M. ; Di Cioccio, L. ; Fournel, F. ; Garrione, J. ; Letertre, F. ; Faure, B. ; Kernevez, N.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.119-127, 2005. Pennington, NJ. Electrochemical Society
Deguet, C. ; Dechamp, J. ; Morales, C. ; Charvet, A.M. ; Clavelier, L. ; Loup V. ; Hartmann, J.M. ; Kernevez, N. ; Campidelli, Y. ; Allibert, F. ; Richtarche, C. ; Akatsu, T. ; Letertre, F.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.78-88, 2005. Pennington, NJ. Electrochemical Society
Superplasticity in advanced materials : ICSAM 2003 : [8th International Conference on Superplasticity in Advanced Materials, 28-30 July 2003, St. Catherine's College, Oxford, UK]. pp.49-54, 2004. Zuerich, Switzerland. Trans Tech Publications