1.

Conference Proceedings
Conference Proceedings
1. UHV-TEM STUDIES OF LASER-INDUCED DAMAGE IN SILICON
Savage, T. S. ; Xu, P. ; Ai, R. ; Dunn, D. ; Marks, L. D.
Pub. info.: Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A..  pp.495-500,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 236
2.

Conference Proceedings
Conference Proceedings
2. MICROSTRUCTURES OF Si(111) ON ION SPUTTERING AND ELECTRON ANNEALING
Ai, R. ; Savage, T. S. ; Xu, P. ; Zhang, J. P. ; Marks, D.
Pub. info.: Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A..  pp.259-264,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 236
3.

Conference Proceedings
Conference Proceedings
3. IN-SITU STUDY OF RADIATION DAMAGE IN V2O5 INDUCED BY LOW ENERGY ELECTRONS
Ai, R. ; Fan, H.-J. ; Stair, P.C. ; Marks, L.D.
Pub. info.: Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.599-604,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 157
4.

Conference Proceedings
Conference Proceedings
4. Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), and Secondary Ion Mass Spectroscopy (SIMS) Characterization of the Morphology of Aluminum Bond Pads for Surface Reflectivity Applications
Schade, M. ; Ai, R. ; Stein, Y. ; Anderson, T.
Pub. info.: Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.425-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 406
5.

Conference Proceedings
Conference Proceedings
5. Defects Induced by Arsenic Ion Implantation and Thin Film-Edge Stresses
Chang, G. ; Ai, R. ; Chiou, H.-D.
Pub. info.: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.123-131,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-12