Courboin, D. ; Choi, J.W. ; Jung, S.H. ; Baek, S.H. ; Kim, L.-J. ; Ahn, C.N. ; Kim, H.-S.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology XI. pp.106-117, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering