1.

Conference Proceedings

Conference Proceedings
Kwon, S.-W. ; Jeong, H.-S. ; Kim, L.-J. ; Ahn, C.-N. ; Kim, H.-S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.796-803,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
2.

Conference Proceedings

Conference Proceedings
Chang, B. -S. ; Chang, Y. -Y. ; Bang, S. -H. ; Lee, I. -S. ; Kim, L. -J. ; Ahn, C.-N. ; Kim, H. -S.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59923Q-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
3.

Conference Proceedings

Conference Proceedings
Bok, C.K. ; Kim, S.-K. ; Kim, H.-B. ; Oh, J.-S. ; Ahn, C.-N. ; Shin, K.-S.
Pub. info.: Optical Microlithography XV.  Part Two  pp.810-821,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
4.

Conference Proceedings

Conference Proceedings
Eom, T.-S. ; Ahn, C.-N. ; Park, D.-H. ; Koh, C.-W. ; Bok, C.-K.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1575-1583,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
5.

Conference Proceedings

Conference Proceedings
Kim, H.-B. ; Ma, W.-K. ; Ahn, C.-N. ; Shin, K.-S.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1278-1286,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
6.

Conference Proceedings

Conference Proceedings
Lim, C.-M. ; Song, J.-H. ; Woo, S.-S. ; Kwon, K.-S. ; Ahn, C.-N. ; Shin, K.-S.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1412-1420,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
7.

Conference Proceedings

Conference Proceedings
Oh, S.-Y. ; Kim, W.-H. ; Yune, H.-S. ; Kim, H.-B. ; Kim, S.-M. ; Ahn, C.-N. ; Shin, K.-S.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1537-1543,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
8.

Conference Proceedings

Conference Proceedings
Nam, K.-H. ; Cho, H.-J. ; Jeong, S.-H. ; Ahn, C.-N. ; Kim, H.-S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.197-204,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130