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16 results

Conference Proceedings

1. FLOATING TEMPERATURE DEPOSITION OF DEVICE QUALITY SiO2 THIN FILM BY DECR PLASMA

Agius, B. ; Hugon, M.C. ; Jiang, N. ; Varniere, F. ; Plais, F. ; Pribat, D. ; Froment, M. ; Puech, M.

Pub. info.:	Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.. pp.181-186, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	284

Conference Proceedings

2. Electrical Properties of Si3N4 Deposited by DECR PECVD on InP

Delmotte, F. ; Hugon, M.C. ; Agius, B. ; Courant, J.L.

Pub. info.:	Proceedings of the Twenty-Seventh State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXVII). pp.236-241, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-21

Conference Proceedings

3. Physical and Electrical Properties of DECR Plasma Deposited SiNx:H Films on Si and InP

Delmotte, F. ; Hugon, M.C. ; Sitbon, S. ; Agius, B. ; Courant, J.L.

Pub. info.:	Proceedings of the eleventh International Symposium on Plasma Processing. pp.675-687, 1996. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	96-12

Conference Proceedings

4. PHYSICOCHEMICAL PROPERTIES OF RF MAGNETRON SPUTTERED LEADL ZIRCONATE TITANATE THIN FILMS

Cattan, E. ; Agius, B. ; Achard, H. ; Joly, J.P. ; Cheang Wong, J.C. ; Ortega, C. ; Siejka, J.

Pub. info.:	Ferroelectric thin films II : symposium held December 2-4, 1991, Boston, Massachusetts, U.S.A.. pp.173-178, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	243

Conference Proceedings

5. Use of Transmission Electron Microscopy for the Characterization of the Structure of Pt/PZT/Pt/TiN/Ti/SiO2/Si Correlation with Electrical Properties

Verniere, F. ; Eakim, B. ; Aubert, P. ; Ayguavives, F. ; Agius, B. ; Bisaro, G.

Pub. info.:	Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes. pp.309-316, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-30

Conference Proceedings

6. Interface and Volume Defects in SiNx:H/<100>Si Prepared by DECR Plasma Deposition

Aubert, P. ; Delmotte, F. ; Hugon, M.C. ; Agius, B. ; Cantin, J.L. ; von Bardeleben, H.J.

Pub. info.:	Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes. pp.283-291, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-30

Conference Proceedings

7. Correlation between Insitu Optical Emission Spectrocopy of a O2/Ar Reactive Plasma and Composition of PZT Thin Film Deposited from Metallio Target by RF Magnetron Sputtering

Ayguavives, F. ; Aubert, P. ; Eakim, B. ; Machu, A. ; Varniere, F. ; Agius, B.

Pub. info.:	Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes. pp.299-308, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-30

Conference Proceedings

8. RF Magnetron Sputtering Epitaxially Grown (Pb,La)TiO3 Thin Films on (0001) Al2O3 and (001) SrTiO3 for Nonlinear Optical Applications

Rabibisoa, U. ; Agius, B.

Pub. info.:	Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.. pp.711-, 1999. Warrendale, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	541

Conference Proceedings

9. Optical and Electrical Characterizations of PZT Films with Different O/Pb Stoichiometry

Hugon, M. C. ; Kim, B. Ea ; Varniere, F. ; Agius, B. ; Masetti, E.

Pub. info.:	Ferroelectric thin films V : symposium held April 7-12, 1996, San Francisco, California, U.S.A.. pp.407-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	433

10.

Conference Proceedings

10. Narrow resonance profiling study of the oxidation of Ti1-xAlN barrier layer

Hugon, M. C. ; Desvignes, J. M. ; Letendu, F. ; Agius, B. ; Vickridge, I. ; Kim, D. J. ; Ayguavives, F. ; Kingon, A. I.

Pub. info.:	Ferroelectric thin films VIII : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.. pp.97-, 2000. Warrendale, PA. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	596

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