1.

Conference Proceedings
Conference Proceedings
1. Electrical Measurements of Annealed Boron Implants for Shallow Junctions
Fiory, A.T. ; Baurdelle, K.K. ; Lefrancois, M.E. ; Camm, D.M ; Agarwal, A.
Pub. info.: Advances in rapid thermal processing : proceedings of the symposium.  pp.133-140,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-10
2.

Conference Proceedings
Conference Proceedings
2. Reduced Poly-Si Gate Depletion Effect by Pulsed Excimer Laser Annealing
Wong, H.Y. ; Takeuchi, H. ; King, T.-J. ; Ameen, M. ; Agarwal, A.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.205-215,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-01
3.

Conference Proceedings
Conference Proceedings
3. Mechanistic Studies of Silicon Wafer Bonding and Layer Exfoliation
Weldon, M.K. ; Marsico, V.E. ; Chabal, Y.J. ; Agarwal, A. ; Eaglesham, D.J. ; Sapjeta, J. ; Brown, W.L. ; Jacobson, D.C. ; Caudano, Y. ; Christman, S.B. ; Chaban, E.E.
Pub. info.: Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications.  pp.229-248,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-36
4.

Conference Proceedings
Conference Proceedings
4. HIGH ENERGY IMPLANTATION OF BORON: REDUCTION OF THREADING DISLOCATION DENSITY IN THE BAD DOSE REGION
Bourdelle, K.K. ; Eaglesham, D.J. ; Jacobson, D.C. ; Agarwal, A.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1241-1249,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
5.

Conference Proceedings
Conference Proceedings
5. LOW TEMPERATURE IMPURITY GETTERING FOR GIGA-SCALE INTEGRATED CIRCUIT TECHNOLOGY
Rozgonyi, G.A. ; Koveshnikov, S. ; Agarwal, A.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.868-883,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
6.

Conference Proceedings
Conference Proceedings
6. BORON-ENHANCED-DIFFUSION OF BORON FROM ULTRA- LOW-ENERGY BORON IMPLANTATION
Agarwal, A. ; Eaglesham, D.J. ; Gossmann, H.-J. ; Pelaz, L. ; Herner, S.B. ; Jacobson, D.C. ; Haynes, T.E. ; Erokhin, Yu E.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1232-1240,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
7.

Conference Proceedings
Conference Proceedings
7. Ultra-Shallow Junction Formation Using Ion Implantation and Rapid Thermal Annealing: Physical and Practical Limits
Agarwal, A. ; Gossmann, H.-J.L. ; Fiory, A.T. ; Venezia, V.C. ; Jacobson, D.C.
Pub. info.: Rapid thermal and other short-time processing technologies : proceedings of the international symposium.  pp.49-60,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-9
8.

Conference Proceedings
Conference Proceedings
8. 22 Pulsed Excimer Laser Annealing for Meeting Near-Term Gate-Stack Process Challenges
Wong, H.Y. ; Takeshi, H. ; Padilla, A. ; King, T.-J. ; Ameen, M. ; Agarwal, A.
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium.  pp.179-187,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-05
9.

Conference Proceedings
Conference Proceedings
9. Limestone Slurry Scrubbing for SO2 Emission Control-Modeling and Parameter Estimation
Agarwal, A. ; Rochelle, G. T.
Pub. info.: AIChE 1994 SUMMER MEETING - DENVER, CO - AUGUST 14-17, 1994.  1994.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1994
10.

Conference Proceedings
Conference Proceedings
10. Defect Engineering for Silicon Microphotonics
Agarwal, A. ; Foresi, J.S. ; Giovane, L.M. ; Liao, L. ; Michel, J. ; Wada, K. ; Kimerling, L.C.
Pub. info.: Proceedings of the Third International Symposium on Defects in Silicon.  pp.215-224,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-1