Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.. pp.201-206, 1999. Warrendale, Pa.. Materials Research Society
Moody, N.R. ; Adams, D.P. ; Medlin, D. ; Headley, T. ; Yang, N.
Pub. info.:
THERMEC '2003 : International Conference on Processing & Manufacturing of Advanced Materials, July 7-11, 2003, Leganés, Madrid, Spain. pp.3403-3408, 2003. Zuerich-Uetikon, Switzerland. Trans Tech Publications
Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.. pp.81-84, 1999. Warrendale, Pa.. Materials Research Society
Thin films : stresses and mechanical properties IX : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A.. pp.323-328, 2002. Warrendale, Pa.. Materials Research Society