Phase shift algorithm for white-light interferometry insensitive to a linear error in phase shift increment (Invited Paper) [6048-07]

Phase shift algorithm for white-light interferometry insensitive to a linear error in phase shift increment (Invited Paper) [6048-07]

Author(s):: Adachi M. ( Kanazawa Univ. (Japan) )
Publication title:: Optomechatronic actuators and manipulation : 5-7 December 2005, Sapporo, Japan
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 6048
Pub. Year:: 2005
Page(from):: 604806
Page(to):: 604806
Pages:: 1
Pub. info.:: Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819460844 [0819460842]
Language:: English
Call no.:: P63600/6048
Type:: Conference Proceedings

Details

TDL ID:	ZA00016083
Series ID:	PA00000029
Conf. info. (Name):	Optomechatronic Technologies : Optomechatronic actuators and manipulation
Conf. info. (Number):	2005
Conf. info. (Venue):	Sapporo, Japan
Conf. info. (Date):	2005.12.05-2005.12.07

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