Phase shift algorithm for white-light interferometry insensitive to a linear error in phase shift increment (Invited Paper) [6048-07]
- Author(s):
- Adachi M. ( Kanazawa Univ. (Japan) )
- Publication title:
- Optomechatronic actuators and manipulation : 5-7 December 2005, Sapporo, Japan
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6048
- Pub. Year:
- 2005
- Page(from):
- 604806
- Page(to):
- 604806
- Pages:
- 1
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460844 [0819460842]
- Language:
- English
- Call no.:
- P63600/6048
- Type:
- Conference Proceedings
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