MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California. pp.46-50, 1999. Bellingham, Washington. SPIE - The International Society for Optical Engineering
Title of ser.:
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Micro-optical technologies for measurement, sensors, and microsystems II and Optical fiber sensor technologies and applications : 18-20 June 1997, Munich, FRG. Part 1 pp.248-256, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
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Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas. pp.164-173, 1995. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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