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19 results

Conference Proceedings

1. Development of focused-ion-beam repair for quartz defects on alternating phase-shift masks

Matsumoto,M. ; Abe,T. ; Yokoyama,T. ; Miyashita,H. ; Hayashi,N. ; Sano,H.

Pub. info.:	Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan. pp.308-321, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3096

Conference Proceedings

2. Proximity effect correction for reticle fabrication

Kamikubo,T. ; Abe,T. ; Oogi,S. ; Anze,H. ; Shimizu,M. ; Itoh,M. ; Nakasugi.T. ; Iijima,T. ; Hattori,Y.

Pub. info.:	Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan. pp.173-177, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3096

Conference Proceedings

3. Control of resist heating effect

Anze,H. ; Abe,T. ; Sakurai,H. ; Iijima,T. ; Hattori,Y. ; Nakayamada,N. ; Kamikubo,T.

Pub. info.:	Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA. pp.256-265, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3997

Conference Proceedings

4. Local melting with scanning tunneling microscopy and its application: microbonding between silicon and glass at room temperature

Wang,Q. ; Abe,T. ; Ono,T. ; Esashi,M.

Pub. info.:	Smart electronics and MEMS II : 13-15 December 2000, Melbourne, Australia. pp.286-293, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4236

Conference Proceedings

5. High Resistivity Cz Silicon for RF Applications Substituting GaAs

Abe,T. ; Qu,W.

Pub. info.:	High Purity Silicon VI : proceedings of the sixth International Symposium. pp.491-500, 2000. Pennington, N.J., Bellingham, Wash.. Electrochemical Society — SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4218

Conference Proceedings

6. Observation of Internal Defect in Functionally Gradient PSZ-Ni by Ultrasonic Imaging

Abe,T. ; Sumi,S.

Pub. info.:	Nondestructive characterization of materials VII : proceedings of the seventh International Symposium on Nondestructive Characterization of Materials held in Prague, Czech Republic, June 1995. pp.605-610, 1996. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	210-213

Conference Proceedings

7. Effects of Si3N4 Films on Diffusion of Boron and Extended Defects in Silicon during Post-Implantation Annealing

Zaitsu,Y. ; Osada,K. ; Shimizu,T. ; Matsumoto,S. ; Yoshida,M. ; Arai,E. ; Abe,T.

Pub. info.:	Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995. pp.1891-1896, 1995. Zurich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	196-201

Conference Proceedings

8. Impurity Controll in Silicon Crystals for G-bit Scale Integration

Abe,T.

Pub. info.:	Shallow Impurities in Semiconductors : Proceedings of the Fifth International Conference on Shallow Impurities in Semiconductors "Physics and Control of Impurities", International Conference Center Kobe, Japan, 5 to 8 August, 1992. pp.17-28, 1993. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	117-118

Conference Proceedings

9. Role of Point Defects in Oxygen Agglomeration in Si

Tajima,M. ; Takeno,H. ; Warashina,M. ; Abe,T.

Pub. info.:	Proceedings of the 17th International Conference on Defects in Semiconductors : ICDS-17, Gmunden, Austria, July 18-23, 1993. Pt.1 pp.147-152, 1994. Zurich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	143-147

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Conference Proceedings

10. Epitaxy of Deposited α-Fe Films on High-Index Cu Substrate Planes

Fujii,T. ; Abe,T. ; Inoue,S. ; Kato,M.

Pub. info.:	Intergranular and interphase boundaries in materials : iib95 : proceedings of the 7th International Conference on Intergranular and Interphase Boundaries in Materials held in Lisboa, Portugal, June 26-29, 1995. pp.233-236, 1996. Zurich-Uetikon, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	207-209

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